L i b r a r y & I n f o r m a t i o n R e s o u r c e s
OSA proceedings on soft-x-ray projection lithography: proceedings of the tropical meeting, May 10-12, 1993, Monterey, California
| Author |
Hawryluk,Andrew M. (ed.)
Stulen,Richard H. (ed.) Optical Society of America | Publication Data | Washington, D.C.: Optical Society of America, 1993 | Physical Description | X, 226p | Notes |
- '' Volume 18'' |
ISBN | 1-55752-304-5 | Subject Area | Engineering | Subject Headings | X-RAY LITHOGRAPHY -- CONGRESSES | Call Number | 621.381531 OSA | Table of Contents | No Publisher Information |
Item Information
| Copy | Barcode | Reg # | Volume ID | Item Status | Due Date | Location | Media Type | 1 | 073293 | 73410 | AVAILABLE | English hall - 1st floor |
|---|
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