L i b r a r y & I n f o r m a t i o n R e s o u r c e s
Mechanical microsensors
| Author |
Elwenspoek,M.
Wiegerink,R. | Publication Data | Berlin: Springler, 2001 | Physical Description | X, 295p | Series Data |
Microtechnology and mems;
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Subject Area | Manufactures | Subject Headings | Detectors -- Design and construction Microelectromechanical systems -- Design and construction Transducers Silicon Micromachining | Call Number | 681.2 ELW |
Item Information
| Copy | Barcode | Reg # | Volume ID | Item Status | Due Date | Location | Media Type | 1 | E020194 | AVAILABLE | English hall - 1st floor |
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Item Status With (*). cannot be charged